Featured Parts

---

PCH Arm Assy   

Head Spindle   

Rotary Union   

Quick Exchanger   

CLC Flow Controller (Malema)   

DDF3 (Diaphragm Type)   

IPA Spray Bar   

Mega Tank   

Mega Heater   

Mega Generator   

Platen Motor   

Kollmorgen Motor    

300mm   AMAT LKP Preclean Cable Assy   

300mm   AMAT LKPrime Padcond Sweep
   Driver [Yaskawa]   

300mm LKPrime Elmo Driver    

300mm AMAT LKPrime Cleaner Fan   

300mm   AMAT LKPrime FI I/O
   Controller   

300mm   AMAT LKP Preclean
   Buff Pad    

Padcon Hub    

Wet Robot    

Motor and Driver   

Fabs Robot   

Padcon DDF3, New or Cylinder   

Loadcup   

Spindle   

Flow Controller   

End Point Module   

Platen   

Quick Exchanger   

Megasonic Tank   

Megasonic Generator    

Pneumatic Manifold   

Brush Wafer Roller Assemble   

AIO/DIO/MEI Board   

Gear Assembly Brush Module       

Part number - Description:       

0190-15759  PC Sweep Motor    

0190-14713  Head Sweep Motor    

0010-33476  Idler Assy Meg Tank    

0040-87416  Roller Welded Meg Module    

0021-26287  Idler Extend Meg Tank    

0090-01270  Linear Sensor, Load Cup, 100mm    

0090-01271 Linear Sensor, Load Cup, 25mm    

0090-04123  Dryer Tank Output Sensor    

0090-07996  Platen Shield Up Sensor    

0090-07997  Platen Shield Down Sensor    

0090-08451  PC up Down Sensor   

0021-26607 Roller Washer    

0020-90015 Idler Washer    

0010-63614  Brush Module Idler Assy    

0730-00044  Slurry Block    

3020-00121  Platen Shield Cylinder    

3020-00094  Cylinder Air 20mm Bore 75mm Cone LL    

3020-00093  Cylinder Air 20mm Bore 20mm Cone HH    

0021-83600  GIMBAL Disk    

0190-19949  Bellows,Brush Module    

0190-28494  PC up Down Sensor HPPC    

0090-07212  Sensor, Wafer Gripper,Open/Close,Output Station    

0090-07212  sensor,wafer gripper,open/close,output station    

0090-04088  sensor,catcher raised,output station    

0090-04087 sensor,catcher lowered,output station    

0021-27285 pusher TIP,VDPM    

0090-08488  sensor,crescent wafer present,VDPM    

0090-05953 sensor meg tank Lo-Lo    

0090-05951  sensor meg tank Hi    

0090-06282  sensor meg tank Hi-Hi    

1200-00941 RLY    

0190-41700  wet robot plunger cylinder with sensor    

1400-30935  sensor flow 20-250ml/min w/rr dspl 42lg bleed    

0041-39479 wafer sensor, pedestal    

0021-55244  HPLC pedestal    

0090-08194 wafer loss sensor fiber optic    

0090-06666 PROX wafer sensor    

0090-08963  sensor assy, home,output station    

0090-08487 sensor assy, pusher wafer present,VDPM    

0190-15401 devicenet digital I/O IP link coupler block 4in 4out    

0190-15402  devicenet analog output IP link extension block 4out    

0190-15403  devicenet analog input IP link   extension block 4in    

0100-01325  assembly,PCB wafer exchange sensor board    

0040-78239  bellows,gripper    

0190-37977  bellow platen shield    

0020-19428  bellows,pedestal,loadcup    

0041-38734  bellows,cone,loadcup    

0190-76967 6 psi manifold assy,UPA    

0190-76969  6 psi manifold assy with adapter,UPA   

0190-76968  15 psi maniflod assy,UPA    

0190-41234 sensor wafer protsurionado-S7     

Part number - Description:  

0090-08485 Sensor Assy,Pusher Wafer Snsr, Vd,Refle   

3870-05661 Valve, Pneu Nc 1/8rc Pilot, High Back Pr   

3870-05664 Valve, Pneu Nc 1/8rc Pilot, High Back Pr   

3950-00228 Lkp Hclu Nozzle   

0190-89991 Valve Inj Ipa 2.5g/Min 120v Ipa 15c-35c   

0021-44861 Brush Spray Bar Flare Fitting   

0021-27285 Pusher Tip,Vdpm Desica 300mm   

0090-07997 Platen Shield Down Sensor, 300mm Reflexi   

0090-07212 Sensor Assy, Wafer Gripper, Open/Closed   

0090-07996 Platen Shield Up Sensor 300mm Reflexion   

0190-14713  Motor, Head Sweep Assembly, 300mm Refelx   

0190-15402 Devicenet Analog Output Ip Link Extensio   

0051-06133  Ipa Spary Mainfold Weldment 3000mm Vdpm   

0190-15759 Servomotor, Pc Sweep/We, Lk Polisher   

3610-00159 Pulley, 24teeth, Al, 14mm Board, 39.5mm  

0022-02756  Wafer Bend Constraint, Ehclu, Lk Prime   

0051-26238  Plug Union Female 1 Inch Pvc   

0090-05336 Elect Assy, Door Open/Cls   

0090-05598  Elect Assy, Transducer Cable Assy -Cleane   

0140-24332  Harness Assy, Hclu Encoder, Reflexion Gt   

0190-29897  Specification, Brush Wafer Rotation Moto   

0190-32134 Blade, Robot, Kawasaki Nt570   

0190-32134 Blade, Robot, Kawasaki Nt570   

0190-34329 Pnuematic Plunger, L, Kawasaki Nt570   

0190-34330 Pnuematic Plunger, R, Kawasaki Nt570   

0190-46835  Snsr Temp Ir 12-24vdc 10:1 8-14m 0 To 50   

0540-00074  Amplifier, Digital Fiber Sensor   

0620-00990  Cable Assy Extenson 0.6m, 3pos 8mm Plast   

0620-04575 Cable Assy, Pc Sweep Mtr Enc Extension,  

0620-06585  Cable Assy, 3cond 24awg, Wk 90-Deg Fem C   

0820-90101 Sensor. Fiber Optic Head Thru Beam 

1200-00894 2p Relay, Din Rail 24vdc   

1400-01491 Sensor, Inductive M5, 3 Wire 0.2m Length   

1400-01498  Snsr, Optical Level, 24v Dc, 1/4npt, Tef   

3060-00830 Bearing, 15id X 32o D X 9w, Shield,Sstl   

3610-00143 Dynamic Slo T, Belt Tensio Ner   

3860-00436  Tbg 3/8 Od X 1/4 Id .063 Wall Astm-3307   

3870-06843 Valve Pneu Nc 3port M5x.8 Bo Dy Ported   

3870-06893  Valve Body Ported Pneu N/O 3port M5x0.   

3950-00061 Noz Spray 1/8npt Kynar 80deg @ 40psi .03   

0051-05866  Gas Line, Pr1, Mpv1, Hybrid Valve, Cmp 3   

0190-30259  Specification, Megsonics Tank Motor, Ref   

0190-41234  Sensor Wafer Protsurionado-S7   

3020-00184 Cyl Air 30mm Bore 10mm Strk   

0010-46418  Assembly, Rtpc Module   

0190-37306  Specification, Vapor Dry Lift Motor, Ref   

0190-33729 Spec, 30w Brush Gap Control Motor, Rlk/P   

1270-02008  Sw Flow Air 10 To 100slm 3/8" Npt W/O L    

Part number - Description:

3080-01168  Belt Tmg 1/5p 1/4w 90t 18"L Nyl/Nprn   

3080-01169 Belt Tmg 1/5p 1/4w 121t 24.2"L Nyl/Nprn   

3080-00021 Belt Tmg 10mmw 5mmp 365mmlg   

3080-00237  Belt, Tmg, 5mm Pitch X 276t X 10mmw X 13   

0041-05177  Spring, Wafer Exchanger, Lcwe   

0041-05178 Spring, Cone, Lcwe   

0022-03754 Adaptor, Cap, Adjust, Holder Mount, Shaf   

0090-06850 Snsr Assy Hclu Wafer Sense 300mm   

0190-49010 Lfc, Ultrasonic, 1.6 Lpm Pltn1   

0620-04574 Cable Assy, Pc Sweep Mtr Pwr Extension,   

1270-02826 Sw Cyl Position Npn 10-28vdc 2-Wire Inli   

1350-00491  Prssr Snsr,-100to100kpa,1to 5v Output*   

3030-17608 Digital Lfm, Evd1, Ipa 2.5gpm F.S. 1/4 &   

3800-00498  Rgltr Electro-Pneu 0.5 Mpa, 1/4rc, 24vdc   

3870-05702 Manifold, Iso 3/8"T Lq3, 1/8rct Pilot   

0090-05371 Sensor Harness,Megasonic Tank Hi-Hi,Refl   

0090-05373 Snsr Harness,Megasonic Tank Hi Di,Reflex   

3870-05665 Valve, Pneu Nc 1/8rc Pilot, High Back Pr   

4060-00723  Manifold, Regulators X7, Precision, 0.8m   

3690-02498  Scr Btn Hd Hex Skt M3x0.5 6lg Iso7380-1   

0190-80807  Lfc, 550 Ml/Min, Polisher  

0022-11760 Clamp, Pb33r Pad Cond Mount, Pre-Clean   

0021-55008 Bracket，Belt   Idler Mt   

0022-04678  Bearing，Gimbal，Pad Conditioner   

0022-04679  Flexure，Gimbal，Pad Conditioner   

0190-76967 6 Psi Manifold Assy,Upa   

0190-76969  6 Psi Manifold Assy With Adapter,Upa   

0190-76968  15 Psi Maniflod Assy,Upa   

0090-06313  Elec Assy，Cleaner   Ffu Fan   

0090-06850  Hclu Wafer Sensor   

0090-05361  Sensor，Platen   Shield Up、Dn   

3040-00045  Rod End Bearing，Male   

0010-35747  Meg Tank Idler Assy   

0010-36300  Roller 1 Assy   

0010-36299  Roller 2 Assy   

0021-26287  Idler Extended Meg Tank   

0021-83077  Platen Shield Bellows   

3080-00159  Meg Long Belt   

3080-00160  Meg Short Belt   

0040-87416  Roller Welded Meg Module   

0090-04123  Dryer Tank Output Sensor   

0090-05331  Wafer Detected Sensor， Brush   

0090-07212  Sensor,Wafer Gripper,Open/Close,Output Station   

0090-04088  Sensor,Catcher Raised,Output Station   

0090-04087  Sensor,Catcher Lowered,Output Station   

0021-27285  Pusher Tip,Vdpm   

0090-08485  Dry Tank Wafer Sensor   

3020-00545  Dryer Pusher Cylinder   

0190-34621  Plunger Sensor Set，Kawasaki Nt570   

0190-61460  Fi Robot，Right   Blade   

0190-61461  Fi Robot，Left   Blade   

3620-00698 Meg Pump   

Part Number - Description

 2700071 Filter Micron 0.45 W/Plug Hd Adpt Gaskt(Di Filter) (White M)    

5000132 Stdf 3/8Lx3/8X6-32 Rnd, Ceramic, Ceramic(Di Filter) (White M)   

5001057 Stdf 5/8Lx3/8X6-32 Cer 2601, Ceramic(Di Filter) (White M)   

17109340 Bshg Snap Insulator, Vespe(Di Filter) (White M)   

17114680 Insulator Feed-Thru Conn, Pom, Pom(Di Filter) (White M)   

17156990 Cathode/Arc Wire Els/Ias, Ta, Ias(Di Filter) (White M)   

17230090 Arc Slit T15 W, High(Di   Filter) (White M)   

170156358 Screw Shoulder SUS   

440001339 Screw #8-32 X .1875 Cone(Di Filter) (White M)   

Ph3 Source Species Cathode Pm(Di Filter) (White M)   

Shield Source, Gph, Cg   

Shield Clamp Ring, Gph Cg(Di Filter) (White M)   

Bearing Kit Rms Idler   

Potentiometer,Linear,1K X Mm(Di Filter) (White M)   

70 Degree Waveguide Pm Hcs(Di Filter) (White M)   

Kit, 90 Degrees Wave Assy(Di Filter) (White M)   

70 Degree Wave Guide  Texture(Di Filter) (White M)   

Liner Assy Angle Ctrl,Hpg Hpg(Di Filter) (White M)   

70 Degree Waveguide Hp,Texture Kits(Di Filter) (White M)   

Particle Filter Disk Chill(Di Filter) (White M)   

#42905CG Block,U,Sideplate,D2, Gph Gph(Di Filter) (White M)   

10-171540CG Probe,Hall,Graphite, Gph C Cg(Di Filter) (White M)   

10-172780CG Face, Closed Loop Faraday, Gph(Di Filter) (White M)   

10-173800CG Lens Beam Focusing Low Energy(Di Filter) (White M)   

12-010064CG Hcs Arc Chamber Graphite, Gph(Di Filter) (White M)   

12-170676CG Liner L Shape Horizontal Amu(Di Filter) (White M)   

12-170677CG Liner Horizontal Amu, Gph, Cg(Di Filter) (White M)   

12-170678CG Block (4) Amu, Gph, (Di Filter) (White M)   

12-170703CG Liner (4) Striker Plate Gph(Di Filter) (White M)   

12-170704CG Block (1) Amu, Gph, (Di Filter) (White M)   

12-170705CG Block (2) Amu, Gph, (Di Filter) (White M)   

12-170706CG Block (3) Amu, Gph, (Di Filter) (White M)   

12-170707CG Shld (2) Bolt Head Gph(Di Filter) (White M)   

12-170708CG Liner (1) Striker Plate Gph(Di Filter) (White M)   

12-170709CG Liner (3) Striker Plate Gph(Di Filter) (White M)   

12-170782CG Insert Graphite Sce Flange(Di Filter) (White M)   

12-171690CG Shield,Entrance,Resolving Gph(Di Filter) (White M)   

12-172600CG Shield,Graphite, Exit, 300Mm Variable Variable(Di Filter) (White M)   

12-172620CG Plate, Graphite, Side, Gph, Cg(Di Filter) (White M)   

12-173060CG Aperture Beamgate Grounded, Gph, Cg(Di Filter) (White M)   

12-173580CG Housing Assy Graphite Insert, Gph(Di Filter) (White M)   

12-173710CG Aperture,Vertical,Exit, Gp Cg(Di Filter) (White M)   

170-550CG Retainer Magnet, Gph, Cg    

171-250CG Plate Scanning, Gph, Cg   

171-370CG Shield Internal Faraday Cup, Gph(Di Filter) (White M)   

171-460CG Shield Graphite Faraday Set-Up Up(Di Filter) (White M)   

171-520CG Plug Gas Graphite, Gph Cg(Di Filter) (White M)   

171-630CG Plate Exit Suppression Electrode, Gph(Di Filter) (White M)   

171-670CG Aperture,Exit,Flood Gun,Ho Horizontal(Di Filter) (White M)   

171-680CG Aperture Vertical Exit, Gph, Cg(Di Filter) (White M)   

172-180CG Dump Sampling Cup, Gph, Cg(Di Filter) (White M)   

172-340CG Electrode Ground, Gph, Cg   

172-410CG Shield, Scan Plate Assy, Gph(Di Filter) (White M)   

172-440CG Shield Horizontal First, Gph, Cg(Di Filter) (White M)   

172-480CG Aperture Faraday Cup, Gph Cg(Di Filter) (White M)   

172-750CG Shield Graphite Faraday Aperture, Gph(Di Filter) (White M)   

172-760CG Shield Graphite Aperture Exit, Gph(Di Filter) (White M)   

172-850CG Electrode Filler D2 Assy, Gph(Di Filter) (White M)   

172-890R1CG Liner Graphite Housing, Gph Cg(Di Filter) (White M)   

172-970CG Electrode Suppression Base, Gph, Cg(Di Filter) (White M)   

173-000CG Electrode Ground Dual Contour Deg(Di Filter) (White M)   

173-000R2CG Electrode Ground Upgrade Two Same Hole Big Dual Contour(Di Filter) (White M)   

173-030CG Electrode Side D2 Assy, Gph(Di Filter) (White M)   

173-130CG Electrode Side D2 Assy, Gph(Di Filter) (White M)   

173-140CG Aperture,Horizontal,Exit,L Wide(Di Filter) (White M)   

173-220CG Bushing Gas Ihc Source, Gph(Di Filter) (White M)   

173-370CG Block Spacer Graphite, Gph Cg(Di Filter) (White M)   

173-380CG Cover Graphite, Gph, Cg    

173-500CG Electrode Ground 4_70Mm_185 Hcs, Gph(Di Filter) (White M)   

173-620CG Shield Roplate Base Seagull, Gph(Di Filter) (White M)   

173-650CG Plate, Suppression Electrode, Gph Cg(Di Filter) (White M)  

173-880CG Plate Scanning, Gph, Cg   

173-920CG Lens. D2 Assy, Gph Cg(Di Filter) (White M)   

174-040CG Shield, Plate, Decel Lens, Gph(Di Filter) (White M)   

174-060R1CG Block,U,Sideplate ,D2, Modified, Gph Modified(Di Filter) (White M)   

174-480CG Electrode, Suppression, D1, Hcs, Gph(Di Filter) (White M)   

174-500CG Electrode,Suppression,Left Hcs(Di Filter) (White M)   

174-860CG Sideplate, Single Feedthru, D2, Gph(Di Filter) (White M)   

174-870CG Sideplate, Dual Feedthru, Gph Cg(Di Filter) (White M)   

175-070CG Clipper, Wide, Curved Ground Electode(Di Filter) (White M)   

175-480CG Ground Elect,R12.007M,Curved Hcp D2., Curved(Di Filter) (White M)   

1750-390CG Suppression Elect,R11.994M,Curved Hcp, Gph Curved(Di Filter) (White M)   

177-000CG Inside Entrance, Liner, 90 (Di Filter) (White M)   

17A0732 Feed Thru, Alu, High Purity(Di Filter) (White M)   

17S4891 Feed Thru Insulator, Vespe(Di Filter) (White M)   

4-171300CG Liner Graphite 5Kg Dimer Magnet(Di Filter) (White M)  

4-171340CG Shield #1 Resolving Chamber, Cg(Di Filter) (White M)   

4-171350CG Shield #2 Resolving Chamber, Cg(Di Filter) (White M)   

4-171380CG Shield Graphite Source Gate Valve(Di Filter) (White M)   

4-171500C-CG W220917500-07R2C Aperture Variable Main Variable Main X(Di Filter) (White M)   

4-171970CG Liner Graphite Source Chamber, Gph(Di Filter) (White M)   

4-172150R2-1CG W220990150-07R2, Coil Assy, Source, Source Graphite Hc In One(Di Filter) (White   M)   

4-172150R2-2CG W220990150-07R2, Coil Assy, Source, Source Graphite Hc In One(Di Filter) (White   M)   

4-172600CG Shield #1 Resolving Chamber Gph(Di Filter) (White M)   

4-172900CG Cover Sealing Ring, Gph Cg(Di Filter) (White M)   

4-172900R1-2CG Quad Graphite Front Modified Main(Di Filter) (White M)   

4-172900R1-3CG Quad Graphite Front Modified Main(Di Filter) (White M)   

4-172910CG Quad Plate Graphite For E(Di Filter) (White M)   

4-172930CG Quad Mounting Plate Linear Graphite(Di Filter) (White M)   

4-172940CG Quad Shield Left Post Lens(Di Filter) (White M)   

4-172960CG Liner Source Chamber Graphite Lower(Di Filter) (White M)   

4-172970CG Liner Source Chamber Graphite Upper(Di Filter) (White M)   

4-173110CG Shield, Cup, Tall Hybrid Profiler(Di Filter) (White M)   

4-173120CG Housing,Pixel,Tall Hybrid Profiler, Gph, Profiler(Di Filter) (White M)   

4-173124CG Shield Left, Post 90 Gph(Di Filter) (White M)   

4-173134CG Liner, Right, Quadii, Gph Cg(Di Filter) (White M)   

4-173150CG Shield, Profiler, Shaft, Gph, Cg(Di Filter) (White M)   

4-173430CG Shield Graphite Quad Lens Side(Di Filter) (White M)   

4-173440CG Shield Graphite Reslv Side, Gph(Di Filter) (White M)   

4-173450CG Shield Cup In-Vac Profiler, Profiler(Di Filter) (White M)   

4-173500CG D2-Insert,Graphite, Gph, C Cg(Di Filter) (White M)   

4-173580CG Shield Heat With Insert Graphites On(Di Filter) (White M)   

4-173684CG Shield Quad, Post 90 Gph(Di Filter) (White M)   

4-173724CG Shield, Wide Resolving Chamber, Gph(Di Filter) (White M)   

4-173730CG Liner, Housing, End Station Lens(Di Filter) (White M)   

4-173750CG D1 Lens Assy Liner Exit   Resolving Chamber Four(Di Filter) (White M)   

4-173770CG Side Shield, Ivp,Tall, Gph, Gph(Di Filter) (White M)   

4-173810CG Aperture Variable Hcs Main, Gph(Di Filter) (White M)   

4-173870CG Hoising Pixel Hc Cup-10Cm Cm(Di Filter) (White M)   

4-173910CG Liner, Housing,Es Lens-Gra Graphite(Di Filter) (White M)   

4-173920CG Side, Shield, Ivp, Gph, Cg(Di Filter) (White M)   

4-173970CG Shield Sleeve Decel Es Lens(Di Filter) (White M)   

4-174200CG Liner Wide, Exit, Resolving Chamber(Di Filter) (White M)  

4-174470CG Shield,Wide Resolving Chamber, Gph Gph(Di Filter) (White M)   

4-174661CG Liner Plate, Ang Control, Back(Di Filter) (White M)   

4-174691R1CG Liner, Ang Control, Right Pc(Di Filter) (White M)   

4-174920CG Uem Q3 Cover, Liner, Graphite(Di Filter) (White M)   

4-175271CG Liner, Ang Control, Left Pc(Di Filter) (White M)   

4-176930CG Shield,Front,Q3,Uem Gph Cg Gph(Di Filter) (White M)  

 5-113750R1CG Drum Assy Right Rms, Tenon(Di Filter) (White M)   

5-113751R1CG Drum Assy Left Rms, Tenon(Di Filter) (White M)   

5-170511CG Aperture Beam Def Plt, Gph(Di Filter) (White M)   

5-171020CG Screw Shields, Gph, Cg   

5-171230CG Aperture Entrance E-Shower, Gph, Gph(Di Filter) (White M)   

Part Number - Description

5-171440CG Graphite Liner Electron Shower, Gph(Di Filter) (White M) 

5-171510CG Pole Short Es Quad, Gph(Di Filter) (White M)   

5-171520CG Electrode Filament, Gph, C(Di Filter) (White M)  

5-171561CG Extraction Electrode, Gph,(Di Filter) (White M)   

5-171570-1CG Ina 57064 Fld Rpl Ground Plate(Di Filter) (White M)   

5-171570-2CG Strike Plate (1) Disk Gph(Di Filter) (White M)   

5-171580-1CG Target Graphite E-Shower, Gph, Gph(Di Filter) (White M)   

5-171580-2CG Strike Plate (2) Disk, Cg(Di Filter) (White M)   

5-171590CG Strike Plate (3) Disk,, Cg(Di Filter) (White M)   

5-171600CG Strike Plate (4) Disk, Cg(Di Filter) (White M)   

5-171750-1CG Plate Strike Graphite Faraday Setup(Di Filter) (White M)  

5-171860CG Shield Face Resolving Aperture, Gph(Di Filter) (White M)   

5-172010CG Liner (1) Striker Plate Gph(Di Filter) (White M)   

5-172020CG Liner (2) Striker Plate Gph(Di Filter) (White M)   

5-172030CG Liner (3) Striker Plate Gph(Di Filter) (White M)   

5-172040CG Liner (4) Striker Plate Gph(Di Filter) (White M)   

5-172050CG Liner (5) Striker Plate Gph(Di Filter) (White M)   

5-172060CG Liner (7) Striker Plate Gph(Di Filter) (White M)   

5-172070CG Block (1) Fem, Gph, (Di Filter) (White M)   

5-172100CG Block (4) Fem, Gph, (Di Filter) (White M)   

5-172110-1CG Block (5) Fem, Gph, (Di Filter) (White M)   

5-172110CG Adapter Ring Disc Faraday Graphite(Di Filter) (White M)  

5-172120CG Shield Bolt Head Fem, Gph(Di Filter) (White M)   

5-172130CG Aperture (1) Fem, Gph, (Di Filter) (White M)   

5-172140CG Aperture (2) Fem, Gph, (Di Filter) (White M)   

5-172170-1CG Liner (3) Striker Plate Gph(Di Filter) (White M)   

5-172170CG Liner Graphite Beam Guide Plate(Di Filter) (White M)   

5-172180CG Liner (4) Striker Plate Gph(Di Filter) (White M)   

5-172190CG Block (1) Amu, Gph, (Di Filter) (White M)   

5-172200CG Block (2) Amu, Gph, (Di Filter) (White M)   

5-172210CG Block (3) Amu, Gph, (Di Filter) (White M)   

5-172220CG Dis 72743 Fld Rpl Shield Bolt(Di Filter) (White M)   

5-172230CG Shield (2) Bolt Head Gph(Di Filter) (White M)   

5-172320CG Aperture Faraday Resolver, Gph, Cg(Di Filter) (White M)   

5-172410CG Liner,Lower,C-Magnet, Gph, Gph(Di Filter) (White M)   

5-172420CG Liner,Upper,C-Magnet, Gph, Gph(Di Filter) (White M)   

5-172520CG Liner,Exit,Lower,C-Magnet, Magnet(Di Filter) (White M)  

5-172530CG Liner,Exit,Upper,C-Magnet, Magnet(Di Filter) (White M)   

5-172860CG Cathode Mtg Plt, Gph, Cg(Di Filter) (White M)   

5-172962CG Aperture Gun Impregnated & Coated(Di Filter) (White M)   

5-173250CG Slit, Gph, Cg   

5-173350CG Liner Fem Bellows Lead, Gph(Di Filter) (White M)   

5-173360CG Liner Lead, Gph Cg    

5-173810R13CG Aperture,Insert,Hc, Non-Guide,3Mm Thick, Impregnated, Guide Mm(Di Filter) (White M)   

5-174200CG Plate, Scanning, Gph, Cg    

5-174331CG Graphite Liner, Ang Control Pc(Di Filter) (White M)   

5-17F732CG Liner Amu Bellows, Gph, Cg(Di Filter) (White M)   

6-107840CG Aperture Beam Defining Pla(Di Filter) (White M)   

6-172870CG Liner, Entrance, Lower, C-Magnet, Magnet(Di Filter) (White M)   

6-172880CG Liner, Entrance, Lower, C-Magnet, Magnet(Di Filter) (White M)   

7-172080CG Block (2) Fem, Gph, (Di Filter) (White M)   

7-172090CG Block (3) Fem, Gph, (Di Filter) (White M)   

7-173510CG Cup,Scan,Faraday,Closed Lo Loop(Di Filter) (White M)   

8-171510CG Aperture Filament, Gph, Cg(Di Filter) (White M)   

8-172240CG Aperture 1 Amu, Gph, (Di Filter) (White M)   

8-173343CG Shield,Chamber Wall,90 Exit,Textured, Gph Textured(Di Filter) (White M)   

8-173344CG Liner, Top/Bottom, Quad Ii, Ii(Di Filter) (White M)   

8-173610CG Shield Roplate Base Butterfly, Gph(Di Filter) (White M)   

8-173640CG Electrode, Ground, Gph, Cg    

8-173720CG Liner Top/Bottom Quad2, Gph Gph(Di Filter) (White M)   

8-175780CG Cover,Liner,Graphite, Gph Cg(Di Filter) (White M)   

9-172230CG Liner 90 Degree Beam Top(Di Filter) (White M)   

9-172240CG Liner 90 Degree Beam Side(Di Filter) (White M)   

9-172880R6CG Supression Electorde,Modified, Main Body, Body(Di Filter) (White M)   

9-172890R2CG Electrode, Ground, Graphite Xe Main(Di Filter) (White M)   

9-173560CG Liner 90 Deg Beam W(Di   Filter) (White M)   

9-173630CG Shield, Bottom, 90 Deg Gph(Di Filter) (White M)   

9-173640CG Shield,Top,Chamber,90 Degr Gph(Di Filter) (White M)   

A3-17S597 Feedthru 11 Eshower, Alu, Purity(Di Filter) (White M)   

ABN-173470 Filament Insulator Hbc Grade Sef(Di Filter) (White M)   

AC-3-170590 Insul Es Quad, Ceramic, High(Di Filter) (White M)   

AG-5-172400 Strap Filament Clamp Right, Ag(Di Filter) (White M)   

AL-5-172360 Clamp,Cathode Strap,Ihc Source Al, Source(Di Filter) (White M)   

AL-5-172820 Plate Insulator Mounting Single, Al(Di Filter) (White M)   

AL-5-172830 Plate, Insul Mounting, Filaments, Ihc(Di Filter) (White M)   

AL-5-173380 Shield,Filament Post, Al, High High(Di Filter) (White M)   

AL-5-173420R1 Liner Shell, Angle Control Al(Di Filter) (White M)   

AL-5-174070 Shield,Ground,Tube,Ihc Source Al, High Source(Di Filter) (White M)   

C-1-172850R1 Insulator Suppression Assy, Bn, High(Di Filter) (White M)   

C-1-172900R3 Insulator Small, 20Kv, D2, Ceramic(Di Filter) (White M)   

C-1-173800R5 Insulator, Multi Step, T:9Mm Mm(Di Filter) (White M)   

C-1-176980R1 Insulator Single Shield Inner,D2 D(Di Filter) (White M)   

C-1-176980R2 Insulator Single Shield Outer,D2 D(Di Filter) (White M)   

C-1-176980R3 Insulator Twin Shield Inner,D2 D(Di Filter) (White M)   

C-1-176980R4 Insulator Twin Shield Outer,D2 D(Di Filter) (White M)   

C-2-170620 Bushing Burnthru Sensor, Ceramic, High(Di Filter) (White M)   

C-2-170840 Insulator Lamp Dual Vaporizer, Bn(Di Filter) (White M)   

C-2-170980  Screw Lamp Insulator, Ceramic, High(Di Filter) (White M)   

C-2-171680 Insulator, Ceramic, High P(Di Filter) (White M)   

C-2-172000 Insulator Cathode Feedrhru, Ceramic, High(Di Filter) (White M)   

C-2-172280 Insulator Dual Mount Ihc Source(Di Filter) (White M)   

C-2-175540 Insulator, Filament, Pfg, Ceramic, High(Di Filter) (White M)   

C-2-982001 Insulator, Ceramic, High P(Di Filter) (White M)   

C-3-170680 Insulating Bushing Arc Chamber, Ceramic(Di Filter) (White M)   

C-3-171310 Insulator Standoff Source, Ceramic, High(Di Filter) (White M)   

C-3-171410 Insulator, Vespel   

C-3-171590 Repeller Insulator Els/Ias, Ceramic, Ceramic(Di Filter) (White M)   

C-3-172680 Flange Seal, Ceramic, High Purity(Di Filter) (White M)   

C-3-172690 Ball Seal, Ceramic, High Purity(Di Filter) (White M)   

C-3-172870 Insulator Cathode Plt, Ceramic, High(Di Filter) (White M)   

C-4-172700R2 Insulator, Long, 20Kv,D2,Hc, Ceramic, Hc(Di Filter) (White M)   

C-4-172700R2-1 Insulator Single Shield Inner,D2,Hc, D(Di Filter) (White M)   

C-4-172700R2-2 Insulator Single Shield Outer,D2,Hc, D(Di Filter) (White M)   

C-5-061911 Tel Formula Upper Hub    

C-5-170851R2 Multi Step Insulator Hp, Bn(Di Filter) (White M)   

C-5-172850 Insulator Suppression Assy, Ceramic, High(Di Filter) (White M)   

C5-175540R5 Insulator, Filament,Pfg, Modified, Mi, Mi(Di Filter) (White M)   

E17014833 Tantalum Source Gas Tube   

E17094620  Bushing Burnthru Sensor, C(Di Filter) (White M)   

E17117500  W220917500-07R2C Aperture Variable Main Variable Main(Di Filter) (White M)   

E17176010  Liner Waveguide 1 70 (Di Filter) (White M)   

E17176020  Liner Waveguide 2 70 (Di Filter) (White M)   

E17176030  Liner Waveguide 3 70 (Di Filter) (White M)   

E17176040  Liner Waveguide 4 70 (Di Filter) (White M)   

E17176050  Liner Waveguide 5 70 (Di Filter) (White M)   

E17181800  Liner Waveguide Bottom One Hc(Di Filter) (White M)   

E17181810  Liner Waveguide Bottom Two(Di Filter) (White M)   

E17181820  Liner, Waveguide, Bottom, (Di Filter) (White M)   

E17181830  Liner Waveguide Bottom Fou(Di Filter) (White M)   

E17181840  Liner Waveguide Bottom Fiv(Di Filter) (White M)   

E17182340  Shield #1 Resolving Chamber, (Di Filter) (White M)   

E17182350  Shield #2 Resolving Chamber, (Di Filter) (White M)   

E17195230  Trimmer 1 hc   

E17195240  Trimmer 2 hc   

E17195250  Trimmer 3 hc   

E17195270  Trimmer 5 hc   

E17198740  Trimmer supper   

E17270040  Liner Outer Retainer 70 (Di Filter) (White M)   

E17270050  Liner Inner Retainer 70 (Di Filter) (White M)   

E17270060  Liner Interlocked 70 Waveg(Di Filter) (White M)   

E17275850  Eletrode, Filler, D2 Assy   

E17290150R2  W220990150-07R2, Coil Assy, Source, Source Graphite Hc In One(Di Filter) (White   M)   

E17292050  Liner End Cathode Tungsten(Di Filter) (White M)   

E17293900R1  Quad Graphite Front Modified Main(Di Filter) (White M)   

E17293910  Quad Plate Graphite For E(Di Filter) (White M)   

Part Number - Description

E17293930  Quad Mounting Plate Linear Graphite(Di Filter) (White M)   

E17293940  Quad Shield Left Post Lens(Di Filter) (White M)   

E17295630R5 Cathode Shafless   

E17296900  Cover Sealing Ring, Gph   

E17297230  Liner 90 Degree Beam Top(Di Filter) (White M)

E17297240  Liner 90 Degree Beam Side(Di Filter) (White M)   

E17298170R2  Center Support, Outside 90 Magnet(Di Filter) (White M)   

E17299730R2 Liner, End, Top Plate,90 Degree(Di Filter) (White M)   

E17299730R2  Liner, End, Top Plate, Deg(Di Filter) (White M)   

E17299750R2  Block, Inside End, 90 Texture(Di Filter) (White M)   

E17299760R2  Block, Outside End, 90 Texture(Di Filter) (White M)   

E17306220  Bushing Gas Ihc Source, Gph(Di Filter) (White M)   

E17312370  Nozzle Tungsten Base Plate Ihc(Di Filter) (White M)   

E17312980R2 Inside Clipper, Liner, 90 Texture(Di Filter) (White M)   

E17312990R2  Outside Clipper, Liner, 90 Texture(Di Filter) (White M)   

E17313000R2  Inside Entrance, Liner, 90 Texture(Di Filter) (White M)   

E17319560  Liner 90 Deg Beam W(Di   Filter) (White M)   

E17319920 Len D2, Assy   

E17320030 Electrode Side D2 Assy Outside(Di Filter) (White M)   

E17320130  Electrode Side, D2 Assy, Inner(Di Filter) (White M)   

E17325580  Shield Heat With Insert Graphites(Di Filter) (White M)   

E17327340  Plate End Cathode Ihc Ver(Di Filter) (White M)   

E17332400  Trimmer, Second, 70 Degree (Di Filter) (White M)   

E17332410  Trimmer, Third, 70 Degree (Di Filter) (White M)   

E17332420  Trimmer, Fourth, 70 Degree (Di Filter) (White M)   

E17332430  Trimmer, Exit, 70 Degree (Di Filter) (White M)   

E17332460R2  Liner, Lower, 1St, 70 Waveguide(Di Filter) (White M)   

E17332470R2  Liner, Lower, 2Nd, 70 Waveguide(Di Filter) (White M)   

E17332480R2  Liner, Lower, 3Rd, 70 Waveguide(Di Filter) (White M)   

E17332490R2  Liner, Lower, 4Th, 70 Waveguide(Di Filter) (White M)   

E17332500R2  Liner, Lower, 5Th, 70 Waveguide(Di Filter) (White M)   

E17332510R2  Liner, Top, 1St, 70 Waveguide(Di Filter) (White M)   

E17332520R2  Liner, Top, 2Nd, 70 Waveguide(Di Filter) (White M)   

E17332530R2  Liner, Top, 3Rd, 70 Waveguide(Di Filter) (White M)   

E17332540R2  Liner, Top, 4Th, 70 Waveguide(Di Filter) (White M)   

E17332550R2  Liner, Top, 5Th, 70 Waveguide(Di Filter) (White M)   

E17332970  Shield Sleeve Decel Es Lens(Di Filter) (White M)   

E17344720  Liner Top/Bottom Quad2, Gp Gph(Di Filter) (White M)   

E17344950CG Liner,Front,Cage,Serviceab Gph(Di Filter) (White M)   

E17350730  Liner, Housing, End Station Lens(Di Filter) (White M)   

E17351430  Shield Graphite Quad Lens Side(Di Filter) (White M)   

E17351440  Shield Graphite Reslv Side, Gph(Di Filter) (White M)   

E17354750  D1 Lens Assy Liner Exit   Resolving Chamber(Di Filter) (White M)   

E17360200CG Aperture,Pfg,Serviceabilit Gph(Di Filter) (White M)  

E17362150CG Aperture,Horizontal,Exit,R Wide(Di Filter) (White M)   

E17367000  Electrode Ground Dual Contour Deg(Di Filter) (White M)   

E17367000R2  Electrode Ground Upgrade Two Same Hole Big Dual(Di Filter) (White M)   

E17377500  Electrode Ground 4_70Mm_185 Hcs, Gph(Di Filter) (White M)   

E17389860R2 Aperture, Base Hcs Main Upgrade(Di Filter) (White M)   

E17390450R2  Liner, Inner, Retainer, 70 Waveguide(Di Filter) (White M)   

E17390460R2  Liner, Outer, Retrainer, 70 Waveguide(Di Filter) (White M)   

E17391343  Shield,Chamber Wall,90 Exi Textured(Di Filter) (White M)   

E17393910  Liner, Housing,Es Lens-Gra Graphite(Di Filter) (White M)   

E17396500  D2-Insert,Graphite   

E17397340CG Electrode,Terminal,D1, Gph Cg(Di Filter) (White M)   

E17397350CG Side Electrode,Terminal,D1 Gph(Di Filter) (White M)   

E17398810  Aperture Variable Hcs Main Iso(Di Filter) (White M)   

E17408200  Liner Wide, Exit, Resolving Chamber(Di Filter) (White M)   

E17409860 Sideplate Dual Feedthru   

E17409870 Sideplate Dual Feedthru   

E17429050  Block, u, Sideplate, D2   

E17429060R1  Block U, Sideplate, D2 Modified(Di Filter) (White M)   

E17441100R1 Aperture, Base Liner Hcs Insert(Di Filter) (White M)   

E17451920R1 Cover,Liner,Graphite Uem Q3 Cover, Q(Di Filter) (White M)   

E17493470  Shield,Wide Resolving Cham Gph(Di Filter) (White M)   

E17505390  Supp, Eletrode, Curved D2   

E17505480 Gnd Eletrode, Curved D2   

E17509070 Exit Clipper, Curved D2   

E17540540 Insulator, Filament, Pfg   

E17644061  Liner,Front,Impregnated, G(Di Filter) (White M)   

INC-350526 Seal Lip Fluorology 1.25 High(Di Filter) (White M)   

SS-5-172310 C-Clamp, Pfg, Sus, High High(Di Filter) (White M)   

T-172040 Liner Side Tungsten, W, High(Di Filter) (White M)   

T-172050 Liner End Cathode Tungsten, W(Di Filter) (White M)   

T-172070 Liner End Repeller Tungsten, W(Di Filter) (White M)   

T-172180 Liner Base Tungsten, W, High(Di Filter) (White M)   

T-172230 Baseplate Ihc 810, W, Purity(Di Filter) (White M)   

T-172310 End Cap Ihc Source Viista Hp(Di Filter) (White M)   

T-172340 Plate Side Ihc Arc Chamber V Hp(Di Filter) (White M)   

T-172370 Plate Front Ihc Source Viista Hp(Di Filter) (White M)   

T-173310 Base Plate,Ihc 80,Ver 3, W(Di Filter) (White M)   

T-173320 Plate Side Ihc 80 W(Di   Filter) (White M)   

T-173330 Plate End Rep Ihc Ver(Di Filter) (White M)   

T-173340-1 Plate End Cathode Ihc Ver(Di Filter) (White M)   

T-173370 Nozzle Tungsten Base Plate Ihc(Di Filter) (White M)   

T-173690 End Cap Repeller Ihc Ver(Di Filter) (White M)   

T-173830-1 Aperture Baseplate H706 W Main Upgrade(Di Filter) (White M)   

T2-170221 Feed Thru Assy Dual Vaporizer(Di Filter) (White M)   

T2-170930 Support Arc Chamber Left Hand(Di Filter) (White M)   

T2-170931 Support Arc Chamber Right Hand(Di Filter) (White M)   

T2-170940 Support Arc Chamber Center, Mo(Di Filter) (White M)   

T2-172190-1 Bar Clamp Cathode R1 Ehp(Di Filter) (White M)   

T2-172280 Repeller Ihc Source, W, High(Di Filter) (White M)   

T2-172350 Nut 4-40, Mo, High (Di Filter) (White M)   

T2-172510 Nutplate Barclamp Ihc Source, Mo(Di Filter) (White M)   

T2-172540 Clamp Filament Ihc 80, High(Di Filter) (White M)   

T2-172630-7 Cathode Used On Ph3, Mm(Di Filter) (White M)   

T2-172670 Hook Arc Chamber, W, High(Di Filter) (White M)   

T2-173110 Bar Cathode And Repeller Clamp Long(Di Filter) (White M)   

T2-173120 Bar Fil Clamp Short V(Di Filter) (White M)   

T3-170476 Arc Chmbr Spacer, Sus   

T3-170596 Arc Chmbr Spacer, Sus   

T3-170630 Cathode Tungsten Els 2X, W(Di Filter) (White M)   

T3-170650R13 Cathode Assy Tungsten Els, Mm(Di Filter) (White M)   

T3-170650R15 Cathode Assy Tungsten Els, Mm(Di Filter) (White M)   

T3-170650R17 Cathode Assy Tungsten Els, Mm(Di Filter) (White M)   

T3-171340 Cathode Repeller 85% Dense Els(Di Filter) (White M)   

T3-171600 Repeller W Els/Ias, W, W(Di Filter) (White M)   

T3-171610 Repeller Stud W Els/Ias, Ias(Di Filter) (White M)   

T3-172851 Filament Els-2x (.040), w   

T3-173310 Clamp Filament Eterna Els, Tzm(Di Filter) (White M)   

T3-173500 Arc Chamber W-Els/Vae, W, Vae(Di Filter) (White M)   

T3-173520 Liner Bottom W-Els, W, W(Di Filter) (White M)   

T3-173540 Liner Side W-Els Vap, Vap(Di Filter) (White M)   

T3-173550 Liner Repeller W-Els, W, W(Di Filter) (White M)   

T3-173560 Liner Cathode W-Els, W, W(Di Filter) (White M)   

T4-172350R10 Bar Clamp Cathode R1 Ihc(Di Filter) (White M)   

T4-172350R3 Shaftless Cathode Clamp, Tzm, High(Di Filter) (White M)   

T4-172910 Repeller Assy Ihc Source Ver(Di Filter) (White M)   

T4-173700 Insert Electrode Supp Version Le(Di Filter) (White M)   

T4-173750 Insert Suppression Electrode 300Mm Deg(Di Filter) (White M)   

T4-173860R2 Aperture, Base Hcs Main Upgrade(Di Filter) (White M)   

T4-175690 Plate, Side, Ihc Mcs, He(Di Filter) (White M)   

T5-170850R2 Fil Pfg V810 Mc Mm(Di   Filter) (White M)   

T5-172530 Bar Filament Ver2 Ihc Mo(Di Filter) (White M)   

T5-172540R3 Clamp Filament Ihc 80 Filament Els(Di Filter) (White M)   

T5-172920R9 Filament,Els,Slc, W, High High(Di Filter) (White M)   

T5-173460R3 Pfg Filament , Ø1.3Mm W(Di Filter) (White M)   

T5-173880 Repeller Assy, Ihc 3000, W(Di Filter) (White M)   

T5-175680 Key, Alignment, Ihc Mcs He(Di Filter) (White M)   

T5-175700R1 Electrode,Side,Ihc Reduce 5Mm, Mcs Mm Mcs(Di Filter) (White M)   

T6-174100R4 Aperture, Insert, Ihc, 3In1 Hcs Mm(Di Filter) (White M)   

T6-174100R4-1 Aperture, Back Plate Main, Ihc In Hcs Extended Mm(Di Filter) (White M)